Room-Temperature Atomic Layer Deposition of SnO2 Using Tetramethyltin and Its Application to TFT Fabrication. - Kentaro Tokoro; Shunsuke Saito; Kensaku Kanomata; Masanori Miura; Bashir Ahmmad; Shigeru Kubota; Fumihiko Hirose (IEICE Trans. Electron., 2018)