Modeling semiconductor tools for small lotsize FAB simulations. - Kilian Schmidt; Jörg Weigang; Oliver Rose (WSC, 2006)

Improving dispatch rules for cascading tools. - Gero Grau; Jörg Weigang; Kilian Schmidt (CASE, 2007)

Queue time and x-factor characteristics for semiconductor manufacturing with small lot sizes. - Kilian Schmidt; Oliver Rose (CASE, 2007)

Automated generation and parameterization of throughput models for semiconductor tools. - Jan Lange; Kilian Schmidt; Roy Borner; Oliver Rose (WSC, 2008)

Simulation analysis of semiconductor manufacturing with small lot size and batch tool replacements. - Kilian Schmidt; Oliver Rose (WSC, 2008)