Novel charge neutralization techniques applicable to wide current range of FIB processing in FIB-SEM combined system. - Hirotaka Komoda; Masaaki Yoshida; Yoh Yamamoto; Kouji Iwasaki; Ikuko Nakatani; Heiji Watanabe; Kiyoshi Yasutake (Microelectron. Reliab., 2006)

Sample tilting technique for preventing electrostatic discharge during high-current FIB gas-assisted etching with XeF2. - Hirotaka Komoda; Chie Moritani; Kazutaka Takahashi 002; Heiji Watanabe; Kiyoshi Yasutake (Microelectron. Reliab., 2007)