Real-Time Interfacial Pressure Prediction in CMP Using Machine Learning Surrogates of Finite Element Simulations. - Tom Rothe; Andre Lauff; Alexey Shaporin; Peter Thieme; Mudassir Ali Sayyed; Knut Gottfried; Jörg Schuster; Jan Langer; Linda Jäckel; Martin Stoll; Harald Kuhn (Int. J. Autom. Technol., 2025)