Development of an Enterprise-Wide Yield Management System Using Critical Area Analysis for High-Product-Mix Semiconductor Manufacturing. - Yuichi Hamamura; Chizu Matsumoto; Yoshiyuki Tsunoda; Koji Kamoda; Yoshio Iwata; Kenji Kanamitsu; Daisuke Fujiki; Fujihiko Kojika; Hiromi Fujita; Yasuo Nakagawa; Shun'ichi Kaneko (IEICE Trans. Electron., 2009)