Improved Endurance Reliability of Ferroelectric Hafnium Oxide-Based BEoL Integrated MFM Capacitors. - Ayse Sünbül; David Lehninger; Raik Hoffmann; Hannes Mähne; Kerstin Bernert; Steffen Thiem; Thomas Kämpfe; Konrad Siedel; Maximilian Lederer; Lukas M. Eng (IRPS, 2024)