Development of high accuracy wafer thinning and pickup technology for thin wafer. - Chuichi Miyazaki; Haruo Shimamoto; Toshihide Uematsu; Yoshiyuki Abe; Kosuke Kitaichi; Tadahiro Morifuji; Shoji Yasunaga (3DIC, 2010)

Development of high accuracy wafer thinning and pickup technology for thin wafer. - Kosuke Kitaichi; Haruo Shimamoto; Chuichi Miyazaki; Yoshiyuki Abe; Sigeaki Saito; Shoji Yasunaga (3DIC, 2011)