Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor. - Wenjie He; Hai-Tao Zhang; Zhiyong Chen 001; Bo Chu; Kun Cao 003; Bin Shan; Rong Chen (IEEE Trans. Control. Syst. Technol., 2015)

Empirical Model and PSO-Based Algorithm for Efficient Measurement of Gas Permeation Through High Barrier. - Zhiping Chen; Kun Cao 003; Runqing Wu; Lincong Zhang; Xiao-Dong Zhang; Rong Chen (IEEE Trans. Instrum. Meas., 2022)

Selective Atomic Layer Deposition to Extend Moore's Law and Beyond: Surface Kinetic Tuning for Self-Aligned Growth. - Jin Yan; Eryan Gu; Kun Cao 003; Huilong Zhou; Rong Chen (ASICON, 2023)

Calibration of a QMS System for High-Sensitivity Gas Permeation Measurement. - Runqing Wu; Lincong Zhang; Kun Cao 003; Song Tian; Xiao-Dong Zhang; Rong Chen (IEEE Trans. Instrum. Meas., 2023)