A comparison of inversion based Iterative Learning Control Algorithms. - Kuo-Tai Teng; Tsu-Chin Tsao (ACC, 2015)

Control of Wafer Scanners: Methods and Developments. - Marcel François Heertjes; Hans Butler; Nic J. Dirkx; Stan H. van der Meulen; Rahul Ahlawat; Kevin O'Brien; James Simonelli; Kuo-Tai Teng; Yingbo Zhao (ACC, 2020)