Neural-Net Based Optical Ellipsometry for Monitoring Growth of Semiconductor Films. - Gwang Hoon Park; Yoh-Han Pao; Kurt G. Eyink; Steven R. LeClair; M. S. Soclof (AIRTC, 1994)

Neural-net computing for interpretation of semiconductor film optical ellipsometry parameters. - Gwang Hoon Park; Yoh-Han Pao; Boris Igelnik; Kurt G. Eyink; Steven R. LeClair (IEEE Trans. Neural Networks, 1996)