Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability. - Kyotaro Nitta; Masato Sone; Haochun Tang; Chun-Yi Chen; Tso-Fu Mark Chang; Daisuke Yamane; Shinichi Iida; Katsuyuki Machida; Hiroyuki Ito; Kazuya Masu (IEEE SENSORS, 2019)