Micromechanical Thermal Converter Device Based On Polyimide-Fixed Island Structure. - Tibor Lalinsky; M. Krnac; S. Hascik; Z. Mozolova; L. Matay; I. Kostic; P. Hrkut; Jiri Jakovenko; Miroslav Husák (Int. J. Comput. Eng. Sci., 2003)