Nanosheet-based Complementary Field-Effect Transistors (CFETs) at 48nm Gate Pitch, and Middle Dielectric Isolation to enable CFET Inner Spacer Formation and Multi-Vt Patterning. - Hans Mertens; M. Hosseini; Thomas Chiarella; D. Zhou; S. Wang; G. Mannaert; E. Dupuy; D. Radisic; Z. Tao; Yusuke Oniki; Andriy Hikavyy; R. Rosseel; et al. (VLSI Technology and Circuits, 2023)

Vt Fine-Tuning in Multi-Vt Gate-All-Around Nanosheet nFETs Using Rare-Earth Oxide-Based Dipole-First Gate Stack Compatible with CFET Integration. - Hiroaki Arimura; Hans Mertens; Jacopo Franco; L. Lukose; W. Maqsood; S. Brus; Thomas Chiarella; A. Impagnatiello; S. Homkar; V. K. Mootheri; C. Yin; G. Alessio Verni; et al. (VLSI Technology and Circuits, 2024)

Monolithic Complementary Field Effect Transistors (CFET) Demonstrated using Middle Dielectric Isolation and Stacked Contacts. - Steven Demuynck; Victor Vega-Gonzalez; C. Toledo de Carvalho Cavalcante; L. Petersen Barbosa Lima; K. Stiers; C. Sheng; A. Vandooren; M. Hosseini; X. Zhou; Hans Mertens; Thomas Chiarella; Jürgen Bömmels; et al. (VLSI Technology and Circuits, 2024)