A simulator for local anodic oxidation of silicon surfaces. - Lado Filipovic; Hajdin Ceric; Johann Cervenka; Siegfried Selberherr (CCECE, 2011)

A Monte Carlo Simulator for Non-contact Mode Atomic Force Microscopy. - Lado Filipovic; Siegfried Selberherr (LSSC, 2011)

The effects of etching and deposition on the performance and stress evolution of open through silicon vias. - Lado Filipovic; Siegfried Selberherr (Microelectron. Reliab., 2014)

Intrinsic stress analysis of tungsten-lined open TSVs. - Lado Filipovic; Anderson Pires Singulani; Frederic Roger; Sara Carniello; Siegfried Selberherr (Microelectron. Reliab., 2015)

Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors. - Lado Filipovic; Siegfried Selberherr (Sensors, 2015)

Stress in three-dimensionally integrated sensor systems. - Lado Filipovic; Siegfried Selberherr (Microelectron. Reliab., 2016)

Improved Sensing Capability of Integrated Semiconducting Metal Oxide Gas Sensor Devices. - Ayoub Lahlalia; Olivier Le Neel; Ravi Shankar 005; Siegfried Selberherr; Lado Filipovic (Sensors, 2019)

Spline Interpolation-Based Multi-Scale Model for Etching in a Chlorine-Argon Inductively Coupled Plasma. - Lado Filipovic; Tobias Reiter (WSC, 2024)