Vapor-Phase Polishing of Silicon with H2-HBr Gas Mixtures. - Lawrence V. Gregor; Pieter Balk; Frank J. Campagna (IBM J. Res. Dev., 1965)

Sputter-Etching of Heterogeneous Surfaces. - Leon I. Maissel; Charles L. Standley; Lawrence V. Gregor (IBM J. Res. Dev., 1972)