A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes with High Roundness. - Taotao Guan; Fang Yang 006; Wei Wang 087; Peng Liu; Zexin Fan; Leijian Cheng; Zikun Chen; Runze Yu; Qiancheng Zhao; Wei Wang 371; Dacheng Zhang (NEMS, 2018)