Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes. - Shu-Kai S. Fan; Chia-Yu Hsu; Chih-Hung Jen; Kuan-Lung Chen; Li-Ting Juan (Adv. Eng. Informatics, 2020)

Corrigendum to "Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes" [Adv. Eng. Informat. 46 (2020) 101166]. - Shu-Kai S. Fan; Chia-Yu Hsu; Chih-Hung Jen; Kuan-Lung Chen; Li-Ting Juan (Adv. Eng. Informatics, 2020)