Comprehensive 2D-carrier profiling of low-doping region by high-sensitivity scanning spreading resistance microscopy (SSRM) for power device applications. - Li Zhang 033; Mitsuo Koike; Mizuki Ono; Shogo Itai; Kazuya Matsuzawa; Syotaro Ono; Wataru Saito; Masakazu Yamaguchi; Yohei Hayase; Keiryo Hara (Microelectron. Reliab., 2015)