Linearity analysis of closed-loop capacitive accelerometer due to distance mismatch between plates and the influence of compensation capacitor array. - Jingqing Huang; Meng Zhao; Tingting Zhang; Zhongjian Chen; Lichen Hong; Feng Wu; Yacong Zhang; Wengao Lu; Chengchen Gao; Yilong Hao (Sci. China Inf. Sci., 2014)