Adaptive Neuro-Fuzzy Inference System Modeling of MRR and WIWNU in CMP Process With Sparse Experimental Data. - Lih Wen-Chen; Satish T. S. Bukkapatnam; Prahalad K. Rao; Naga Chandrasekharan; Ranga Komanduri (IEEE Trans Autom. Sci. Eng., 2008)