Estimating relative deposition in a multi-zone process using a single composition sensor. - Matthew J. Hilt; Tyrone L. Vincent; Bharat S. Joshi; Lin J. Simpson (ACC, 2005)

Estimating relative deposition rates in a multi-source continuous-deposition process using a single composition sensor. - Matthew J. Hilt; Tyrone L. Vincent; Bharat S. Joshi; Lin J. Simpson (IEEE Trans. Control. Syst. Technol., 2006)