Research on Nonlinear Dynamics of Drive Mode in Z-Axis Silicon Microgyroscope. - Lu Xu 004; Hongsheng Li; Jia Liu; Yunfang Ni; Libin Huang (J. Sensors, 2014)

Frequency Tuning of Work Modes in Z-Axis Dual-Mass Silicon Microgyroscope. - Lu Xu 004; Hongsheng Li; Yunfang Ni; Jia Liu; Libin Huang (J. Sensors, 2014)