Polarization-Dependent Oxygen, Vacancy Distribution in Ferroelectric Hf0.5 Zr0.5 O2 Capacitors. - Gunjan Yadav; Lucía Pérez Ramírez; Nick Barrett; Jean Coignus; Nicolas Vaxelaire; Laurent Grenouillet; Jean Pascal Rueff; Denis Ceolin (NVMTS, 2024)