BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand Breakdown Mechanisms. - Betting Wehring; Raik Hoffmann; Lukas Gerlich; Malte Czernohorsky; Benjamin Uhlig; Robert Seidel; Tobias Barchewitz; Frank Schlaphof; Lutz Meinshausen; Christoph Leyens (IRPS, 2020)