Overview of gate linewidth control in the manufacture of CMOS logic chips. - Donald G. Chesebro; James W. Adkisson; Lyman R. Clark; Steven N. Eslinger; Margaret A. Faucher; Steven J. Holmes; Raymond P. Mallette; Edward J. Nowak; Edward W. Sengle; Steven H. Voldman; Thomas W. Weeks (IBM J. Res. Dev., 1995)