Comprehensive assessment of MEMS double touch mode capacitive pressure sensor on utilization of SiC film as primary sensing element: Mathematical modelling and numerical simulation. - Sumit Kumar Jindal; M. Aditya Varma; Deepali Thukral (Microelectron. J., 2018)

Study of MEMS Touch-Mode Capacitive Pressure Sensor Utilizing Flexible SiC Circular Diaphragm: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison. - Sumit Kumar Jindal; M. Aditya Varma; Deepali Thukral (J. Circuits Syst. Comput., 2019)