Impact of Technology Spreading on MEMS design Robustness. - Vincent Beroulle; Laurent Latorre; M. Dardalhon; Coumar Oudéa; Guy Perez; Francis Pressecq; Pascal Nouet (VLSI-SOC, 2001)

Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk Micromachining. - M. Dardalhon; Vincent Beroulle; Laurent Latorre; Pascal Nouet; Guy Perez; Jean Marc Nicot; Coumar Oudéa (Microelectron. Reliab., 2002)

The advent of MEMS in space. - Xavier Lafontan; Francis Pressecq; Felix Beaudoin; Sebastien Rigo; M. Dardalhon; J.-L. Roux; Petra Schmitt; J. Kuchenbecker; B. Baradat; Djemel Lellouchi (Microelectron. Reliab., 2003)