RF performance of Standard, High-Resistivity and Trap-Rich Silicon substrates down to cryogenic temperature. - Quentin Berlingard; M. Moulin; Jean-Philippe Michel; T. Fache; Ismael Charlet; C. Plantier; Z. Chalupa; Jose Lugo-Alvarez; Jean-Pierre Raskin; Louis Hutin; Mikaël Cassé (ESSDERC, 2023)