Induced Stress Enhancement Using U-shaped Arms in a 3-Axis Piezoresistive MEMS Accelerometer. - M. Hadi Said; Fares Tounsi; Brahim Mezghani; Aftab Ahmed; Shardul Pandit; Rajul Patkar; Pradeep Dixit; M. S. Baghin; V. Ramgopal Rao (SSD, 2018)