Development of a 3-DOF inchworm mechanism organized by a pair of Y-shaped electromagnets and 6 piezoelectric actuators-design, principle, and experiments of translational motions-. - Ohmi Fuchiwaki; Manabu Yatsurugi; Suguru Omura; Kazushi Arafuka (IROS, 2011)

Design of an integrated 3DoF inner position sensor and 2DoF feedforward control for a 3DoF precision inchworm mechanism. - Ohmi Fuchiwaki; Manabu Yatsurugi; Arato Ogawa (ICRA, 2013)

Modeling and primary experiment of a 3-axis PID control with 50 nm resolution for a holonomic precision inchworm robot. - Manabu Yatsurugi; A. Oi; Ohmi Fuchiwaki; Takehiro Higuchi (ICRA, 2014)