A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic Circuits: Ultra Tight Thickness Control And Low Propagation Loss. - Philippe Hélin; Andrea Firrincieli; Ashesh Ray Chaudhuri; Nga P. Pham; Silvia Lenci; Manuel Mannarino; Haris Osman (OECC/PSC, 2019)