Towards building OPC-UA companions for semi-conductor domain. - Selma Azaiez; François Tanguy; Marc Engel (ETFA, 2019)

Multi-level modeling to OPC UA for migrating to Industry 4.0 in semiconductor manufacturing. - Fahad Rafique Golra; Selma Azaiez; Marc Engel (ICPS, 2020)

An industrial feedback on the use of OPC UA for the vertical integration of semiconductor front-ends. - Fahad Rafique Golra; Marc Engel (ETFA, 2021)