The effects of the nitrogen on the electrical and structural properties of the diamond-like carbon (DLC) films. - M. Guerino; Marcos Massi; H. S. Maciel; C. Otani; Ronaldo Domingues Mansano (Microelectron. J., 2003)

Plasma etching of DLC films for microfluidic channels. - Marcos Massi; J. M. J. Ocampo; H. S. Maciel; K. Grigorov; C. Otani; L. V. Santos; Ronaldo Domingues Mansano (Microelectron. J., 2003)

High density plasma chemical vapor deposition of diamond-like carbon films. - Ana Paula Mousinho; Ronaldo Domingues Mansano; Marcos Massi; Luís da Silva Zambom (Microelectron. J., 2003)

The influence of nitrogen and fluorine on the dielectric constant of hydrogenated amorphous carbon (a-C: H) films. - M. Guerino; Marcos Massi; Ronaldo Domingues Mansano (Microelectron. J., 2007)

Design and Analytical Studies of a DLC Thin-Film Piezoresistive Pressure Microsensor. - Luiz Antonio Rasia; Gabriela Leal; Leandro Léo Koberstein; Humber Furlan; Marcos Massi; Mariana Amorim Fraga (WEA, 2017)