ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM. - D. H. Triyoso; Wenke Weinreich; Konrad Seidel; Mark G. Nolan; Patrick Polakowski; D. Utess; Susanne Ohsiek; K. Dittmar; M. Weisheit; M. Licbau; R. Fox (ICICDT, 2014)

ALD ZrO2 processes for BEoL device applications. - Wenke Weinreich; Konrad Seidel; Patrick Polakowski; Stefan Riedel; Lutz Wilde; Dina H. Triyoso; Mark G. Nolan (ICICDT, 2014)

La-doped ZrO2 based BEoL decoupling capacitors. - Wenke Weinreich; Konrad Seidel; Patrick Polakowski; Maximilian Drescher; A. Gummenscheimer; Mark G. Nolan; L. Cheng; D. H. Triyoso (ICICDT, 2016)