Threshold Pressure Sensing Using Parametric Resonance in Electrostatic MEMS. - Md. Nahid Hasan; Mark Pallay; Shahrzad Towfighian (IEEE SENSORS, 2019)

A Combined MEMS Threshold Pressure Sensor and Switch. - Mark Pallay; Shahrzad Towfighian (IEEE SENSORS, 2019)

A Tunable Electrostatic MEMS Pressure Switch. - Mark Pallay; Ronald N. Miles; Shahrzad Towfighian (IEEE Trans. Ind. Electron., 2020)