Detailed simulation for semiconductor manufacturing. - Robert W. Atherton; Linda F. Atherton; Mark Pool (WSC, 1990)

The simulation of cluster tools: a new semiconductor manufacturing technology. - Todd LeBaron; Mark Pool (WSC, 1994)

Optimazation and Analysis of Performance in Simulation. - Mark Pool; Richard Stafford (WSC, 1998)

Productivity modeling of semiconductor manufacturing equipment. - Mark Pool; Robert Bachrach (WSC, 2000)