Modeling and control of thin film morphology using unsteady processing parameters: Problem formulation and initial results. - Martha A. Gallivan; David G. Goodwin; Richard M. Murray (CDC, 2001)

Model reduction and system identification for master equation control systems. - Martha A. Gallivan; Richard M. Murray (ACC, 2003)

Optimization, estimation, and control for kinetic Monte Carlo simulations of thin film deposition. - Martha A. Gallivan (CDC, 2003)

Complexity reduction of a thin film deposition model using a trajectory based nonlinear model reduction technique. - Philipp Wolfrum; Alejandro Vargas; Martha A. Gallivan; Frank Allgöwer (ACC, 2005)

An estimation study for control of a lattice model of thin film deposition. - Martha A. Gallivan (Comput. Chem. Eng., 2005)

Identification of a Dynamic Model for a Thin Film Deposition Process using a Self-Organizing Map. - Cihan Oguz; Martha A. Gallivan (IJCNN, 2006)

An extended Kalman filter for in situ sensing of yttria-stabilized zirconia in chemical vapor deposition. - Rentian Xiong; Paul J. Wissmann; Martha A. Gallivan (Comput. Chem. Eng., 2006)

Identification and Evaluation of a Dynamic Model for a Thin Film Deposition Process. - Cihan Oguz; Martha A. Gallivan (ACC, 2007)

Moving horizon estimation for in situ monitoring of chemical vapor deposition process. - Rentian Xiong; Martha A. Gallivan (ACC, 2007)

Optimization of a thin film deposition process using a dynamic model extracted from molecular simulations. - Cihan Oguz; Martha A. Gallivan (Autom., 2008)