A virtual equipment as a test bench for evaluating virtual metrology algorithms. - Andreas Mattes; Matthias Koitzsch; Dirk Lewke; Michael Müller-Zell; Martin Schellenberger (WSC, 2011)

Virtual equipment for benchmarking predictive maintenance algorithms. - Andreas Mattes; Ulrich Schöpka; Martin Schellenberger; Peter Scheibelhofer; Günter Leditzky (WSC, 2012)

The Factory Integration Roadmap in Semiconductor manufacturing. - James R. Moyne; Martin Schellenberger; Lothar Pfitzner (ESSDERC, 2014)

Direct optical stress sensing in semiconductor manufacturing using Raman micro-spectrometry. - Martin De Biasio; Martin Kraft; Michael Roesner; Christoph Bergmann; Maria Mercedes Cerezuela-Barreto; Dirk Lewke; Martin Schellenberger (IEEE SENSORS, 2016)

Smart Platform for Rapid Prototyping: Solutions in the Dilemma of Flexibility and Standardization. - Sabrina Anger; Felix Klingert; Volker Häublein; Markus Pfeffer; Martin Schellenberger (ICIT, 2021)

Fully convolutional networks for chip-wise defect detection employing photoluminescence images. - Maike Lorena Stern; Martin Schellenberger (J. Intell. Manuf., 2021)