UV Hyperspectral Imaging as Process Analytical Tool for the Characterization of Oxide Layers and Copper States on Direct Bonded Copper. - Mohammad Al Ktash; Mona Stefanakis; Tim Englert; Maryam S. L. Drechsel; Jan Stiedl; Simon Green; Timo Jacob; Barbara Boldrini; Edwin Ostertag; Karsten Rebner; Marc Brecht (Sensors, 2021)