A Composite Two-Dimensional Process/Device Simulation System (TOPMODE) and its Application for Total Process Designing in Submicron VLSI MOS Device Phase. - Shinji Onga; Masami Konaka; Akemi Ohmichi; Kohichi Kanaka; Ryo Dang (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1986)