A Two-Dimensional Integrated Process Simulator: SPIRIT-I. - Masanori Ohgo; Yasuko Takano; Akemi Moniwa; Shuichi Yamamoto; Yoshio Sakai; Hiroo Masuda; Hideo Sunami (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1987)

A Two-Dimensional Etching Profile Simulator: ESPRIT. - Shuichi Yamamoto; T. Kure; Masanori Ohgo; Teruo Matsuzawa; S. Tachi; Hideo Sunami (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1987)