Development of high sensitivity CMOS-MEMS inertia sensor and its application to early-stage diagnosis of Parkinson's disease. - Kazuya Masu; Daisuke Yamane; Katsuyuki Machida; Masato Sone; Yoshihiro Miyake (ESSCIRC, 2016)

A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology. - Toshifumi Konishi; Teruaki Safu; Katsuyuki Machida; Daisuke Yamane; Masato Sone; Kazuya Masu; Hiroshi Toshiyoshi (IEEE SENSORS, 2016)

A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology. - Daisuke Yamane; Toshifumi Konishi; Teruaki Safu; Hiroshi Toshiyoshi; Masato Sone; Kazuya Masu; Katsuyuki Machida (NEMS, 2016)

Evaluation and modeling of adhesion layer in shock-protection structure for MEMS accelerometer. - Daisuke Yamane; Toshifumi Konishi; Teruaki Safu; Hiroshi Toshiyoshi; Masato Sone; Kazuya Masu; Katsuyuki Machida (Microelectron. Reliab., 2016)

Micro-compression study of Ni-Fe(Co)-Ga magnetic shape memory alloy for MEMS sensors. - Kengo Igawa; Tso-Fu Mark Chang; Chun-Yi Chen; Akira Umise; Takashi Nagoshi; Masaki Tahara; Tomonari Inamura; Hideki Hosoda; Volodymyr A. Chernenko; Masato Sone (IEEE SENSORS, 2017)

A study on young's modulus of electroplated gold cantilevers for MEMS devices. - Hideaki Nakajima; Tso-Fu Mark Chang; Chun-Yi Chen; Toshifumi Konishi; Katsuyuki Machida; Hiroshi Toshiyoshi; Daisuke Yamane; Kazuya Masu; Masato Sone (NEMS, 2017)

Design and Development of Fuel Cell Type Gas Sensor with Atomic Au decorated PANI/Pt Composite. - Parthojit Chakraborty; Yu-An Chien; Wan-Ting Chiu; Masato Sone; Takamichi Nakamoto (IEEE SENSORS, 2018)

High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds. - Tatsuya Koga; Katsuyuki Machida; Yoshihiro Miyake; Kazuya Masu; Takashi Ichikawa; Naoto Tanaka; Taiki Ogata; Hiroki Ora; Daisuke Yamane; Noboru Ishihara; Hiroyuki Ito; Masato Sone (BioCAS, 2019)

Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability. - Kyotaro Nitta; Masato Sone; Haochun Tang; Chun-Yi Chen; Tso-Fu Mark Chang; Daisuke Yamane; Shinichi Iida; Katsuyuki Machida; Hiroyuki Ito; Kazuya Masu (IEEE SENSORS, 2019)

Atomic gold decorated polyaniline sensor for gaseous detection. - Parthojit Chakraborty; Yu-An Chien; Wan-Ting Chiu; Tso-Fu Mark Chang; Masato Sone; Takamichi Nakamoto (ISOEN, 2019)

Indirect Sensing of Lower Aliphatic Ester Using Atomic Gold Decorated Polyaniline Electrode. - Parthojit Chakraborty; Yu-An Chien; Tso-Fu Mark Chang; Masato Sone; Takamichi Nakamoto (Sensors, 2020)

Polyaniline-atomic Au modified platinum electrode with ionic liquid as configuration for enhanced electrochemical sensing. - Parthojit Chakraborty; Hiroki Kawakami; Anifatul Faricha; Tso-Fu Mark Chang; Masato Sone; Takamichi Nakamoto (IEEE SENSORS, 2021)

Array of Miniaturized Amperometric Gas Sensors Using Atomic Gold Decorated Pt/PANI Electrodes in Room Temperature Ionic Liquid Films. - Anifatul Faricha; Shohei Yoshida; Parthojit Chakraborty; Keisuke Okamoto; Tso-Fu Mark Chang; Masato Sone; Takamichi Nakamoto (Sensors, 2023)