Implementing virtual metrology into semiconductor production processes: an investment assessment. - Matthias Koitzsch; Humbert Noll; Alexander Nemecek; Jochen Merhof; Markus Michl; Alfred Honold; Gerhard Kleineidam; Holger Lebrecht (WSC, 2011)

A virtual equipment as a test bench for evaluating virtual metrology algorithms. - Andreas Mattes; Matthias Koitzsch; Dirk Lewke; Michael Müller-Zell; Martin Schellenberger (WSC, 2011)