Alignment Procedures for Micro-optics. - Matthias Mohaupt; Erik Beckert; Ramona Eberhardt; Andreas Tünnermann (IPAS, 2010)

Precisely Assembled Multi Deflection Arrays - Key Components for Multi Shaped Beam Lithography. - Matthias Mohaupt; Erik Beckert; Thomas Burkhardt; Marcel Hornaff; Christoph Damm; Ramona Eberhardt; Andreas Tünnermann; Hans-Joachim Döring; Klaus Reimer (IPAS, 2012)