12.9 A 1.55×0.85mm2 3ppm 1.0μA 32.768kHz MEMS-based oscillator. - Samira Zali Asl; Shouvik Mukherjee; Lijun Will Chen; Kimo Joo; Rajkumar Palwai; Niveditha Arumugam; P. Galle; Meghan Phadke; Charles Grosjean; Jim Salvia; Haechang Lee; Sudhakar Pamarti; et al. (ISSCC, 2014)

A 3 ppm 1.5 × 0.8 mm 2 1.0 µA 32.768 kHz MEMS-Based Oscillator. - Samira Zali Asl; James C. Salvia; Ginel C. Hill; Lijun Will Chen; Kimo Joo; Rajkumar Palwai; Niveditha Arumugam; Meghan Phadke; Shouvik Mukherjee; Haechang Lee; Charles Grosjean; Paul M. Hagelin; et al. (IEEE J. Solid State Circuits, 2015)