Review of MEMS metrology solutions. - James F. Nichols; Meghan Shilling; Thomas R. Kurfess (Int. J. Manuf. Technol. Manag., 2008)

A Lipschitz Regularity-Based Statistical Model With Applications in Coordinate Metrology. - Heeyoung Kim; Xiaoming Huo; Meghan Shilling; Hy D. Tran (IEEE Trans Autom. Sci. Eng., 2014)