Micromachined probes with integrated GaAs Schottky diodes for on-wafer temperature sensing. - Linli Xie; Christopher M. Moore; Michael E. Cyberey; Souheil Nadri; Noah D. Sauber; Matthew F. Bauwens; Arthur W. Lichtenberger; N. Scott Barker; Robert M. Weikle (I2MTC, 2018)