Strategy toward Miniaturized, Self-out-Readable Resonant Cantilever and Integrated Electrostatic Microchannel Separator for Highly Sensitive Airborne Nanoparticle Detection. - Maik Bertke; Jiushuai Xu; Michael Fahrbach; Andi Setiono; Hutomo Suryo Wasisto; Erwin Peiner (Sensors, 2019)

In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection. - Andi Setiono; Maik Bertke; Wilson Ombati Nyang'au; Jiushuai Xu; Michael Fahrbach; Ina Kirsch; Erik Uhde; Alexander Deutschinger; Ernest J. Fantner; Christian H. Schwalb; Hutomo Suryo Wasisto; Erwin Peiner (Sensors, 2020)

Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure. - Andi Setiono; Michael Fahrbach; Alexander Deutschinger; Ernest J. Fantner; Christian H. Schwalb; Iqbal Syamsu; Hutomo Suryo Wasisto; Erwin Peiner (Sensors, 2021)

In-Line Measurement of the Surface Texture of Rolls Using Long Slender Piezoresistive Microprobes. - Linus Teir; Tuomas Lindstedt; Thomas Widmaier; Björn Hemming; Uwe Brand; Michael Fahrbach; Erwin Peiner; Antti Lassila (Sensors, 2021)

Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements. - Min Xu; Zhi Li 089; Michael Fahrbach; Erwin Peiner; Uwe Brand (Sensors, 2021)

Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography (Data). - Michael Fahrbach; Min Xu; Wilson Ombati Nyang'au; Oleg Domanov; Christian H. Schwalb; Zhi Li 089; Christian Kuhlmann 003; Uwe Brand; Erwin Peiner (Zenodo, 2023)

Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography. - Michael Fahrbach; Min Xu; Wilson Ombati Nyang'au; Oleg Domanov; Christian H. Schwalb; Zhi Li 089; Christian Kuhlmann 003; Uwe Brand; Erwin Peiner (Sensors, 2023)