A Health Factor for Process Patterns Enhancing Semiconductor Manufacturing by Pattern Recognition in Analog Wafermaps. - Stefan Schrunner; Anna Jenul; Michael Scheiber; Anja Zernig; Andre Kästner; Roman Kern (SMC, 2019)

Machine Learning based Indicators to Enhance Process Monitoring by Pattern Recognition. - Stefan Schrunner; Michael Scheiber; Anna Jenul; Anja Zernig; Andre Kästner; Roman Kern (CoRR, 2021)

Improving wafer map classification in Industry 4.0. - Michael Scheiber; Clement Nartey; Anja Zernig; Andre Kästner (ICPS, 2022)