Virtual metrology for semiconductor manufacturing: Focus on transfer learning. - Rebecca Clain; Valeria Borodin; Michel Juge; Agnès Roussy (CASE, 2021)

A Comparative Evaluation of Deep Learning Anomaly Detection Techniques on Semiconductor Multivariate Time Series Data. - Philip Tchatchoua; Guillaume Graton; Mustapha Ouladsine; Michel Juge (CASE, 2021)

1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing. - Philip Tchatchoua; Guillaume Graton; Mustapha Ouladsine; Julien Muller; Abraham Traoré; Michel Juge (ICCAD, 2022)